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Vac. Sci. Technol. A 31, 050818 (2013)] Gregory N. Parsons Jeffrey W. Elam Steven M. George Suvi Haukka Hyeongtag Jeon W. M. M. (Erwin) Kessels Markku LeskelÃ¤ Paul Poodt Mikko Ritala Steven M. Rossnagel Journal of Vacuum Science & Technology A 2020.38:037001 VoR iText 4.2.0 by 1T3XT true 2020-03-12 Erratum: â€œHistory of atomic layer deposition and its relationship with the American Vacuum Societyâ€ [J. Vac. Sci. Technol. 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